Axcelis Ion implantation systems, built on our next-gen Purion platform, delivers precision, purity, and productivity with the lowest cost of ownership.

Axcelis 人只有一个目标：助力半导体制造商以最低的拥有成本收获最高的质量和良率。 我们通过离子注入平台实现了这一目标，该平台基于独特使能技术，实现无与伦比的纯度、精度和产能。

Mar 1, 2023 · At Axcelis, we have a single goal: to help semiconductor manufacturers achieve the highest quality and yield, with the lowest cost of ownership. We deliver on that goal with ion implant platforms based on unique enabling technologies that provide unmatched purity, precision and productivity.

Axcelis 離子植入系統，建立於我們新一代的 Purion 平台上，提供精密、純度和生產力及最低的生產成本。

Axcelis 离子注入系统依托下一代 Purion 平台，以最低的拥有成本实现高精度、高纯度和高产能。

Jun 13, 2023 · Eaton SEO is now Axcelis Technologies. Eaton corporation files registration statement to spin off Semiconductor Equipment Division, as Axcelis Technologies, Inc, in an IPO. Eaton completes total spin off of Axcelis Technologies in December. NV-8250HT Introduced, high-tilt, medium-current ion implanter introduced, designed for 0.18µm and below processes

Jun 13, 2023 · WORLD HEADQUARTERS Axcelis Technologies 108 Cherry Hill Drive Beverly, MA 01915-1088 Phone: 978.787.4000 Fax: 978.787.3000

May 31, 2023 · Nova ships the first NV-10-60 from its latest facility, an abandoned bowling alley. The NV-10-60 is the industry’s first commercial high current implanter. Revolutionary design features include sliding seal technology, bi-directional mechanical scanning, superb dose uniformity, cooled disks, simple operation. The system featured: Exchange Arms Two disks and automated exchange arms allowed ...

Mar 1, 2023 · Eterna ELS Ion Source is introduced. Improved design promises extended source life, low cost of operation and high reliability for Axcelis ion implanters; Axcelis ships 1000th GSD endstation; Industry standard for proven wafer-handling reliability, productivity

Aug 17, 2023 · Eaton moves to its present location at 108 Cherry Hill Drive, previously the site of Cherry Hill Dairy Farm The stage was set for a major transition in technology when we shipped the world’s first 200mm implanter to IBM (NV4) NV-20 high current system is introduced. The system featured two Unimation Puma six axis robotic […]