When an ordinary beam of neutrons strikes the team’s silicon grating, the millions of scored lines on the grating convert the ...

From the powdered wings of a butterfly to the icy spines of a snowflake, symmetry is a common feature in nature. This often ...

E-beam inspection’s notorious sensitivity-throughput tradeoff has made comprehensive defect coverage with e-beam at these advanced nodes especially problematic. For Intel’s 18A logic node (~1.8nm ...