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The Perkin Elmer PHI-660 scanning Auger microprobe can be used for the compositional analysis of specimen surfaces using Auger electron spectroscopy (AES). The probe depth of AES is on the order of ...
The PHI 5800 X-ray photoelectron spectrometer (XPS) is equipped with a dual source anode (Al and Mg), a hemispherical analyzer for XPS and Auger electron spectroscopy (AES) analysis, including ...
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