Ultrahigh vacuum and surface preparation techniques. Principles of surface analytical techniques, including Auger electron spectroscopy, photoemission, low energy electron diffraction, energy loss ...

The PHI 5800 X-ray photoelectron spectrometer (XPS) is equipped with a dual source anode (Al and Mg), a hemispherical analyzer for XPS and Auger electron spectroscopy (AES) analysis, including ...